McMillan RHODIUM Series MEMS-Based Flow Controllers
McMillan RHODIUM Series MEMS-Based Flow Controllers
McMillan RHODIUM Series Flow Controllers are capable of measuring and controlling virtually any clean, dry gas
as low as 0-50 sccm or as high as 0-10 Lpm. Repeatable results are achieved using a platinum-based microelectromechanical
system (MEMS) flow rate sensor device that is manufactured with extreme precision to ensure
consistent results from unit to unit.
To actively control flow rate, RHODIUM units leverage a high precision PID controller to control a fast-acting solenoid valve. Analog inputs enable direct, fast, and accurate control of the gas flow. Integrated analog outputs report current flow rate for monitoring and control verification.
Compared to conventional mass flow controllers, RHODIUM Series Flow Controllers offer smaller size, higher accuracy, larger turn-down ratios, and faster response times.
MOUNTING
The RHODIUM Series has two female threaded ports on the bottom of the device that accept M4 bolts. An optional mounting plate is available to accommodate installation from the topside.
CALIBRATION
The RHODIUM Series is calibrated in the vertical position. All other positions can cause offset depending on pressure and gas conditions. Flow is unidirectional and must pass through the unit as indicated on the device. All units are calibrated with and for dry nitrogen (N2). Calibration for other gases may be available – please contact the us.
WIRING
A male 9-pin D-sub connector is provided for all power and signal connections. Optional accessories include a mating cable with pigtail leads (9941-1-2M), a connection block that provides screw-down terminals and a port for a power adapter (9941-3), and 120/240 VAC power adapters that can be used with the connection block (9681-4 or 9691-4).
POWER
RHODIUM Series units require 24VDC power and typically draw less than 250 mA of current.
SIGNAL
Two I/O signal configurations are available: 0-5 VDC or 4-20mA. In either case, the lower end of the range represents zero flow (0 VDC or 4 mA) and the high end of the range represents 100% rated flow (5 VDC or 20 mA).
FLUID CONNECTIONS
Each unit features female SAE 9/16-18 straight thread ports for the inlet and outlet. Optional fittings are available with either ¼” or 3/8” stainless steel (316L) tube connections.
1.Flow Performance & Hardware
| Gas | |
| Flow Ranges | See Ordering Information for Flow Range Options |
| Gas Type | N2 |
| Calibration Conditions | |
| Standard Cubic Centimeters Per Minute | Reference Conditions: |
| T = 0° C | |
| P = 760 mmHG | |
| Performance | |
| Accuracy | ± 1.0 % F.S. |
| Repeatability | ± 0.015 % F.S. |
| Response Time | 4 ms |
| Settling Time | 150 ms |
| Control Range | 2% – 100% |
| Operating Conditions | |
| Temperature | 0 – 50° C |
| Humidity | 5 – 95 % R.H. |
| Pressure Range | 0 – 9 Bar (Operating) ; 30 Bar (Burst) |
| Differential Pressure | 0.5 – 3 Bar (Min) ; 7 Bar (Max) |
| Gas Compatibility | Non-aggressive Gases |
| Electronic Interface | |
| Analog Input | 0–5 VDC or 4–20 mA |
| Analog Output | 0–5 VDC or 4–20 mA |
| Fluid | |
| Leak Tightness | 1x 10-8 mBar l/s He |
| Wetted Materials | |
| Aluminum, Silicon, Silicon Nitride, Gold, Platinum, Silicone Die-attach, Epoxy, Stainless Steel, Brass, Viton® |
|
| Fittings | |
| Stainless Steel | 9/16-18 SAE – 1/4” or 3/8” Tube Fitting with O-Ring Seal |
2.Electrical Conditions
| Voltage Supply DC | Nominal | 24 V ± 10 % |
| Ripple | < 50 mV | |
| Current Supply DC | Typical | < 200 mA |
| Maximum | < 250 mA | |
| Warm-Up Time | Deviation < ± 0.1% F.S. | 3 sec |
| Optimum Accuracy | 15 min | |
| Analog Output | Resistive Load | > 2 K Ω |
| Capacitive Load | < 100 nF |
- Active Gas Dilution & Blending
- Carrier Gas Regulation in Mass Chromatography
- Oxygenation For Medical Devices
- Precision Gas Injection for Bioreactors and Fermentors
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